Industry News

Rohm and Haas Electronic Materials Invests $60 Million in 193nm Immersion Lithography System

Published on 2007-06-27. Author : SpecialChem

Marlborough, MA -- Rohm and Haas Electronic Materials (NYSE:ROH) will invest $60 million in leading edge lithography equipment to support its extensive research and development of advanced 193 nanometer (nm) photoresist and anti-reflective coatings used in the manufacture of semiconductor devices.

"As a leading material supplier to the semiconductor industry, our ability to deliver advanced lithography materials is critical, especially as the industry moves down below the 45nm node," said Dr. Dominic Yang, business unit director, Microelectronic Technologies. "This investment will not only enable deep technical partnerships with the front runners in the Memory, Foundry and Logic segments, but will bring to these customers high quality products manufactured and tested using the best tools in the industry."

As part of its investment, Rohm and Haas Electronic Materials will purchase ASML's TWINSCAN™ XT: 1900Gi 193nm Step and Scan system. This tool, along with a new 300mm coat/develop track and state-of-the art defect and metrology equipment, will be installed in first quarter of 2008.

Dr. Peter Trefonas, Research and Development director for Microelectronic Technologies, said the addition of an immersion tool is an important investment for Rohm and Haas. "Many of the world's leading semiconductor manufacturers - our customers - are installing advanced immersion equipment on their commercial lines. This immersion tool investment is the right step at the right time for us," said Dr. Trefonas.

"Our 193nm materials are increasingly being selected as the process of record in the industry," Dr. Trefonas added. "As adoption of immersion technology widens, Rohm and Haas Electronic Materials will continue to push the edge of materials innovation."

About Rohm and Haas Company

Leading the way since 1909, Rohm and Haas is a global pioneer in the creation and development of innovative technologies and solutions for the specialty materials industry. The company's technologies are found in a wide range of markets including: Building and Construction, Electronics, Food and Retail, Household and Personal Care, Industrial Process, Packaging, Paper, Transportation and Water. Our innovative technologies and solutions help to improve life everyday, around the world. Based in Philadelphia, PA, the company generated annual sales of approximately $8.2 billion in 2006.

About Rohm and Haas Electronic Materials

Rohm and Haas Electronic Materials develops and delivers innovative material solutions and processes to the electronic and optoelectronic industries. Focused on the circuit board, semiconductor manufacturing, advanced packaging, and flat panel display industries, its products and technologies are integral elements in electronic devices around the world.

Forward Looking Statement

This release includes forward-looking statements. Actual results could vary materially, due to changes in current expectations. The forward-looking statements contained in this announcement concerning demand for products and services and sales forecasts, involve risks and uncertainties and are subject to change based on various factors, including the continued timely development and acceptance of new products and services, the impact of competitive products and pricing, cost of raw materials, natural gas, and other energy sources, and the ability to achieve price increases to offset such cost increases, and the impact of tax and other legislation and regulation in the jurisdictions in which the company operates. Further information about these risks and others can be found in the company's SEC 10-K filing of February 28, 2007.

Source: Rohm and Haas

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