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Patent

COATED FILM REMOVING APPARATUS


Application Date:
Mar 16, 2017
USPTO Patent:
US 15217825
Abstract:

An apparatus for removing a film coated on a substrate includes a film removing body including a liquid supply device which discharges removing liquid through a discharge opening to a removal portion of a film coate...

Inventors:
Yuji KUBO, Taito-ku (JP)
Rui Kanbayashi, Taito-ku (JP)
Tomoaki Fukuhara, Taito-ku (JP)
Hirotake Ito, Taito-ku (JP)
International Classification:
B08B 3/12 (20170316); G03F 7/42 (20170316); H01L 51/56 (20170316); B08B 3/08 (20170316)

Claims

What is claimed is:

1. An apparatus for removing a film coated on a substrate, comprising: a film removing body including a liquid supply device which discharges removing liquid through a discharge opening to a removal portion of a film coated on a substrate, anda collection device which collects a discharged removing liquid through a collection...

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of International Application No. PCT/JP2015/000306, filed Jan. 23, 2015, which is based upon and claims the benefits of priority to Japanese Application No. 2014-010942, filed Jan. 24, 2014, Japanese Application No. 2014-064042, filed Mar. 26, 2014, Japanese Application No. 2014-085644, filed Apr. 17, 2014,...

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