The Universal Selection Source: Coatings Ingredients

Patent

CUBIC BORON NITRIDE SINTERED BODY, AND COATED CUBIC BORON NITRIDE SINTERED BODY


Application Date:
May 11, 2017
USPTO Patent:
US 15127378
Abstract:

A protection membrane-forming film (1) containing a filler, wherein the average particle size of the filler is not more than 0.4 μm, a protection membrane-forming sheet (2), a production method and an inspection met...

Inventors:
Daisuke Yamamoto, Warabi-shi (JP)
Hiroyuki Yoneyama, Nagareyama-shi (JP)
Youichi Inao, Saitama-shi (JP)
International Classification:
C09D 163/00 (20170511); H01L 23/544 (20170511); H01L 21/66 (20170511); H01L 23/31 (20170511); H01L 21/683 (20170511); H01L 21/78 (20170511); C09J 7/02 (20170511); H01L 23/29 (20170511)

Claims

What is claimed is:

1. A protection membrane-forming film comprising a filler, wherein an average particle size of the filler is not more than 0.4 μm.

Description

TECHNICAL FIELD

The present invention relates to a protection membrane-forming film and a protection membrane-forming sheet capable of forming a protection membrane on a workpiece such as a semiconductor wafer or a processed product obtained by processing the workpiece (for example, a semiconductor chip), and also relates to a production method and...

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